238000004519 manufacturing process Methods 0.000 description 2. 238000001514 detection method Methods 0.000 claims description 4.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by NEC Tokin Corp, NEC Tokin Ceramics Corp filed Critical NEC Tokin Corp Priority to JP2001370448A priority Critical patent/JP2003166831A/en Publication of JP2003166831A publication Critical patent/JP2003166831A/en Status Pending legal-status Critical Current Links Original Assignee NEC Tokin Corp NEC Tokin Ceramics Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Inventor Takeshi Sugawara 剛 菅原 Nagayuki Ono 長幸 小野 Junichi Obata 淳一 小幡 Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Pending Application number JP2001370448A Other languages Japanese ( ja) Google Patents Vibrator supporting structure and piezoelectric vibrator gyro Google Patents JP2003166831A - Vibrator supporting structure and piezoelectric vibrator gyro JP2003166831A - Vibrator supporting structure and piezoelectric vibrator gyro
0 Comments
Leave a Reply. |
AuthorWrite something about yourself. No need to be fancy, just an overview. ArchivesCategories |